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URL: https://www.rigaku.com/products/semi/wda3650
Proper Citation: Rigaku WDA-3650 spectrometer (RRID:SCR_020489)
Description: Simultaneous WDXRF spectrometer film thickness and composition measurements on wafers and media disks.
Resource Type: instrument resource
Keywords: Rigaku, Semiconductor Metrology, Instrument Equipment, USEDit,
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