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URL: https://www.rigaku.com/products/semi/txrf-v310
Proper Citation: Rigaku TXRF-V310 (RRID:SCR_020484)
Description: Wafer surface contamination metrology by VPD TXRF with measurement of ultra trace elemental surface contamination.
Resource Type: instrument resource
Keywords: Rigaku, Semiconductor Metrology, Instrument Equipment, USEDit,
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