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URL: https://plasma.oxinst.com/products/ale/plasmapro-100-ale
Proper Citation: Oxford PlasmaPro 100 ALE Plasma Technology (RRID:SCR_020372)
Description: PlasmaPro 100 ALE delivers precise process control to create and manipulate thinner layers through specialised hardware including precise control of gas dose, repeatability of low power RF delivery, and switching enabled by fast PLC.
Resource Type: instrument resource
Keywords: Oxford, Plasma Technology, Instrument, Resource equipment, Equipment, USEDit,
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