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URL: https://plasma.oxinst.com/products/ald/flexal#product-information-tabs
Proper Citation: Oxford Ionfab 300 IBD Plasma Technology (RRID:SCR_020362)
Description: Ion beam deposition products produce deposited films with high quality, dense and smooth surfaces. Ion beam technology provides approach to etch and deposition by offering single tool and maximising system utilisation, which includes open load, single substrate load lock, and cassette to cassette.
Resource Type: instrument resource
Keywords: Oxford, Plasma Technology, Instrument, Resource equipment, Equipment, USEDit,
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