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URL: https://plasma.oxinst.com/products/ald/flexal
Proper Citation: Oxford FlexAL ALD System Plasma Technology (RRID:SCR_020352)
Description: FlexAL systems provide newrange of flexibility and capability in engineering of nanoscale structures and devices by offering remote plasma atomic layer deposition processes and thermal ALD within single ALD systems.
Resource Type: instrument resource
Keywords: Oxford, Plasma Tehnology, Instrument, Resource equipment, Equipment, USEDit,
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